Measurement and model of a radio frequency microelectromechanical switch

A novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. One potential application of this process is a radio frequency (RF) MEMS switch. This thesis provides an overview of the measurement and modeling techniques used to verify the functionality of an RF MEMS switch that was fabricated using this process. This thesis confirms that this specific RF MEMS design was not fully functioning, but can still be measured, characterized, and modeled