Biocompatible silicon nitride thin films for self-rolled-up microtube technologies: guiding neurons

This thesis presents the evolution and optimization of a self-rolled-up membrane (s-RUM) that is not only insulating, but transparent and biocompatible, allowing it to be integrated into conductance, photonics, and strain-based sensor systems. These microtube-forming membranes are easily fabricated and can be integrated into a microfluidic channel (or become the channel itself) which can be easily integrated into an intravenous or catheter tube for diagnostics. Taking advantage of SiNx’s insulting properties allows conductance-based biosensors to be integrated into the same channel as a surface-enhanced Raman spectroscopy (SERS) sensor. Further, analyte size exclusion is possible via diameter variation and surface functionalization, adding another degree of precision. Extending this platform beyond sensing to cellular growth guidance, we find properties unique to this material system and superior to existing platforms. The SiNx s-RUM platform can be used for applications from sensing to culturing, from disposable electronics to implants, and from brain-computer interfaces to stem-cell functionalized stints