The structure, phase transitions and electrical conductivity of Cu<SUB>2-x</SUB>S films deposited by vacuum evaporation at different substrate temperatures were studied. It was found that the deposition parameters significantly affect the composition and the structure of evaporated Cu<SUB>2-x</SUB>S films. The stoichiometry changes from copper rich to copper deficient as the substrate temperature is increased. This is explained in terms of the mechanism of growth of the Cu<SUB>2-x</SUB>S films. The occurence of phase transitions in these films was studied through measurement of the electrical conductivity as a function of temperature. Films deposited at 300 K exist in the γ phase and undergo a γ →β phase transition at 3...