Textured aluminium-doped ZnO thin films prepared by magnetron sputtering

The electrical properties of RF magnetron-sputtered aluminium-doped zinc oxide (AZO) films are studied. It is seen that the properties are closely related to their structural properties and doping incorporation. The highly conductive milky AZO films with a wedge-like surface consist of very small crystal grains. It is interesting to note that texturization is obtained in this case at a film thickness less than 1µm. At a substrate temperature of 150°C, texturization occurs and the resistivity obtained after hydrogen treatment is 6.9 × 10-4Ωcm. This result is very significant and it may accelerate the application of inexpensive AZO films in hydrogenated amorphous silicon solar cells