Add to ORKGIn this work, we show that macroporous silicon consisting of periodic arrays of etched pores is a feasible alternative for synthesis of 2D and 3d metallic microstructures due to its flexibility in the definition of complex geometries bulk. In addition macroporous silicon features full three-dimensionality, well controlled pore distribution and growth, and scalable dimensions (0.5-100 μm). We present here the fabrication of 3D Ni micro-structures by electroplating of macroporous silicon templates. The given approach can be applied for depositions of different metals and in more complicated template-structures.Peer Reviewe
In this work, a new approach for the one-step integration of interdigitated electrodes on macroporou...
This paper presents a novel technique for the fabrication of ultrahigh capacitance structures based ...
Abstract—A high-yield fabrication process for dense arrays of very-high-aspect-ratio (VHAR) freestan...
In this work, we show that macroporous silicon consisting of periodic arrays of etched pores is a fe...
Three-dimensional (3D) periodic nickel micro-structures with a periodicity of 4 μm and high number o...
This work focuses on the fabrication of three-dimensional (3D) microstructures by electrochemical et...
This paper reports on the fabrication of two-dimensional macropore arrays by electrochemical etching...
New types of metamaterials and architectured material require metallic materials with precise struct...
The review reports results of our research work on nanostructured metal films on porous silicon....
We present a detailed investigation of the fabrication of almost perfect three-dimensional microstru...
The fabrication of macropores in crystalline silicon by photoelectrochemical etching in a hydrofluor...
This paper describes a technique for fabricating three-dimensional, metallic, pyramidal microstructu...
Porous silicon produced by electrochemical etching of silicon has become one of the most popular mat...
In this paper, high-capacity energy storage devices based on macroporous silicon are demonstrated. S...
A new microfabrication technology capable of electro-depositing truly three dimensional metal micro-...
In this work, a new approach for the one-step integration of interdigitated electrodes on macroporou...
This paper presents a novel technique for the fabrication of ultrahigh capacitance structures based ...
Abstract—A high-yield fabrication process for dense arrays of very-high-aspect-ratio (VHAR) freestan...
In this work, we show that macroporous silicon consisting of periodic arrays of etched pores is a fe...
Three-dimensional (3D) periodic nickel micro-structures with a periodicity of 4 μm and high number o...
This work focuses on the fabrication of three-dimensional (3D) microstructures by electrochemical et...
This paper reports on the fabrication of two-dimensional macropore arrays by electrochemical etching...
New types of metamaterials and architectured material require metallic materials with precise struct...
The review reports results of our research work on nanostructured metal films on porous silicon....
We present a detailed investigation of the fabrication of almost perfect three-dimensional microstru...
The fabrication of macropores in crystalline silicon by photoelectrochemical etching in a hydrofluor...
This paper describes a technique for fabricating three-dimensional, metallic, pyramidal microstructu...
Porous silicon produced by electrochemical etching of silicon has become one of the most popular mat...
In this paper, high-capacity energy storage devices based on macroporous silicon are demonstrated. S...
A new microfabrication technology capable of electro-depositing truly three dimensional metal micro-...
In this work, a new approach for the one-step integration of interdigitated electrodes on macroporou...
This paper presents a novel technique for the fabrication of ultrahigh capacitance structures based ...
Abstract—A high-yield fabrication process for dense arrays of very-high-aspect-ratio (VHAR) freestan...