Add to ORKGThe nanometer¿scale oxidation of Si(100) surfaces in air is performed with an atomic force microscope working in tapping mode. Applying a positive voltage to the sample with respect to the tip, two kinds of modifications are induced on the sample: grown silicon oxide mounds less than 5 nm high and mounds higher than 10 nm (which are assumed to be gold depositions). The threshold voltage necessary to produce the modification is studied as a function of the average tip¿to¿sample distance
[[abstract]]Nanometer scale oxide structures have been fabricated on Si substrates using an atomic f...
Atomic force microscope(AFM) induced local oxidation is a versatile and promising nanofabrication pr...
In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (...
The nanometer¿scale oxidation of Si(100) surfaces in air is performed with an atomic force microscop...
Local oxidation of silicon surfaces by scanning probe microscopy is a very promising lithographic a...
Local oxidation of siliconsurfaces by atomic force microscopy is a very promising lithographic appro...
ol en ct d pr n ro surface modification. Some techniques rely on mechanical (contact) interactions b...
In this paper, the initial stages of local anodic oxidation (LAO) process initiated by AFM probe are...
"In order to investigate the factors that control the growth of Si local oxide, the authors have a c...
In this paper, the atomic-scale structure fabrication on Si (100) substrate using atomic force micro...
[著者版]Nano-scale oxide patterns were fabricated on a bilayer-GaSe terminated Si(1 1 1) surface using ...
Scanned probe oxidation (SPO) nanolithography has been performed with an atomic force microscope (AF...
A characterization of local anodic oxidation using scanning probe microscopy is performed on a (100)...
Atomic force microscope (AFM)-based scanned probe oxidation (SPO) nanolithography has been carried o...
Local oxidation by atomic force microscopy (AFM) was studied on a 3 keV Argon (Ar)-ion-bombarded sil...
[[abstract]]Nanometer scale oxide structures have been fabricated on Si substrates using an atomic f...
Atomic force microscope(AFM) induced local oxidation is a versatile and promising nanofabrication pr...
In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (...
The nanometer¿scale oxidation of Si(100) surfaces in air is performed with an atomic force microscop...
Local oxidation of silicon surfaces by scanning probe microscopy is a very promising lithographic a...
Local oxidation of siliconsurfaces by atomic force microscopy is a very promising lithographic appro...
ol en ct d pr n ro surface modification. Some techniques rely on mechanical (contact) interactions b...
In this paper, the initial stages of local anodic oxidation (LAO) process initiated by AFM probe are...
"In order to investigate the factors that control the growth of Si local oxide, the authors have a c...
In this paper, the atomic-scale structure fabrication on Si (100) substrate using atomic force micro...
[著者版]Nano-scale oxide patterns were fabricated on a bilayer-GaSe terminated Si(1 1 1) surface using ...
Scanned probe oxidation (SPO) nanolithography has been performed with an atomic force microscope (AF...
A characterization of local anodic oxidation using scanning probe microscopy is performed on a (100)...
Atomic force microscope (AFM)-based scanned probe oxidation (SPO) nanolithography has been carried o...
Local oxidation by atomic force microscopy (AFM) was studied on a 3 keV Argon (Ar)-ion-bombarded sil...
[[abstract]]Nanometer scale oxide structures have been fabricated on Si substrates using an atomic f...
Atomic force microscope(AFM) induced local oxidation is a versatile and promising nanofabrication pr...
In this letter, we investigate the fabrication of Silicon nanostructure patterned on lightly doped (...