The technology of the termosensitive polycrystalline diamond films prepared by RF low-pressure discharge / N.N.Nikiforenko, A.A.Labuda, M .P.Samtsov

Описана высокочастотная вакуумно-плазменная установка и технология выращивания тонких алмазных поликристаллических плёнок глобулярной формы с хорошими термочувствительными свойствами. Рассмотрены особенности применения спектроскопии комбинационного рассеяния света для контроля микроструктуры и фазового состава получаемых плёнок.The reliable high-frequency vacuum-plasma installation for diamond polycrystalline and diamond-like carbonic films synthesis was created. The process of film synthesis is carried out in the high-frequency of low pressure gas discharge in vapours of methanol, ethanol or acetone. The installation is characterised by low energy and vapours of a working liquid consumption. The technology of thin diamond polycrystalline films deposition (in globular form) with a high temperature factor from 0,5 up to 2,7 %/degree over the range of temperatures from -20 0C to +150 0C is developed. The main features of the Raman spectrum of the polycrystalline diamond thin films (200 - 500 nm) have been studied