TREK1 - a program package of modeling of the ion implantation of materials used in electronic techniques / A.V.Leont'ev, S N.Nechayev

Представлен программный комплекс моделирования ионного легирования материалов электронной техники методом Монте-Карло. Рассмотрены программные аспекты реализации вычислений, а также физические приближения, используемые в комплексе.A package of computer programs is described which treats the slowing down of ions in solids by the means of Monte-Carlo method in the binary collision approximation for an amorphous substance using a screened Coulomb potential for nuclear collisions and the Brandt-Kitagawa theory for the electronic energy loss. For each nuclear collision, the impact parameter and the azimuthal deflection angle are determined from random numbers.The package contains a program of calculation of ion implantation whose features are described above, a database "MME" (Materials of MicroEIectronics) which stores all necessary data for the calculation, and a database control application providing an easy access to the data in MME The programs of the package are made to run under Windows 95/98 and Windows NT operating systems. They were created using the following means: Borland Delphi 3.0. Paradox 7.0, Borland Database Engine 4.5. The running time of the calculation process depends on the problem chosen and is mainly influenced by the number of pseudoions, their energy and atomic properties of the target. For the test example of 100keV boron atoms incident PMMA1 a calculation with 1x10" pseudoions on a computer with the Pentium-166 processor requires about 2 min compared to 7 min by well known Trim95