Stability of methods indirect doze measurements of ion implantation / L.I.Gurskii, V.I.Kiselev, V.l.Khitko

Методом последовательных приближений исследуются вопросы учета исходного технологического разброса в структурах, используемых в косвенной дозиметрии ионной имплантации. Приведены аналитические критерии сходимости, следствием которых является ограничение возможностей применения некоторых физических эффектов для контроля неоднородности дозы.The method of successive approximations investigates problems of the account of initial technological dispersion in structures used in the field of indirect doze measurements of ion implantation. An essential singularity of an offered method is the capability of clarification of distribution of a doze D on some step at the expense of use of similar distribution on the previous step. The convergence of this algorithm is equivalent to fulfilment of a number of analytical conditions, which essence is reduced that sensitivity of parameter of a doze П to the reference value On can be though also high, but it is necessary slow change function from Tl01 D. The use of approximate approximating of a calibration curve reflecting only character of actual dependence TI(D) suffices for the conclusion of rather technological stability of a method indirect doze measurements. The example of a unstablis method based on the phenomenon of an optical interference is resulted