Direct Synthesis of Carbon Nanotubes in CMOS-Layout of Micro-heaters

Direct integration of Carbon Nanotubes (CNTs) in CMOS is important for commercially manufacturing low-cost CNT-based sensors. In such compact sensors, CNTs would act as sensing element, and CMOS circuits would process relevant signals from the CNTs. CNTs can be directly synthesized and integrated into CMOS by local thermal chemical vapor deposition (CVD), where a hot spot of 900 °C can be generated by CMOS micro-heaters. However, a sufficient thermal gradient between the micro-heaters and nearest CMOS devices is a prerequisite to ensure non-destructive temperature (