An attempt is made to fabricate air-cladded SU-8 waveguides of different widths on an oxidized Si substrate using focused ion beam lithography with varying ion doses;and this report discusses limitations & advantages of applying the method on SU-8 for waveguide fabrication purpose. Our starting material is Si (100) substrate.The sample is cleaned by Piranha cleaning;H2O2 is poured in a quartz beaker & conc. H2SO4 is slowly dropped into it (volume ratio of the mixture is 1:1),and left undisturbed for 25mins.Next it is thoroughly rinsed with DI water & is blown with dry nitrogen & is put in oxidation furnace.After reaching a temperature of 10500C,it is oxidized in a sequence of dry-wet-dry for 30mins-2hrs-30mins respectively t...
We present the focused-ion-beam fabrication of slots in silicon waveguides and racetrack resonators....
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...
This work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon subs...
This work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon subs...
We make use of optical lithography along with focused ion beam milling to fabricate our designed pho...
This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices ...
This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices ...
Polymer films with high optical transmission have been investigated for making optical devices for s...
In this work, the planar waveguides are investigated by depositing a SU-8 polymer on PET and quartz ...
© 2016 The Authors. Waveguide (WG) photonic-bridge taper modules are designed for symmetric planar c...
Integrated polymer photonics is efficient and cheap solution for many applications, such as optical ...
Integrated polymer photonics is efficient and cheap solution for many applications, such as optical ...
The paper deals with considerations concerning planar waveguide structures, in which the polymer SU8...
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...
We present the focused-ion-beam fabrication of slots in silicon waveguides and racetrack resonators....
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...
This work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon subs...
This work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon subs...
We make use of optical lithography along with focused ion beam milling to fabricate our designed pho...
This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices ...
This book focuses on the design and development of SU-8 polymer and silicon waveguide-based devices ...
Polymer films with high optical transmission have been investigated for making optical devices for s...
In this work, the planar waveguides are investigated by depositing a SU-8 polymer on PET and quartz ...
© 2016 The Authors. Waveguide (WG) photonic-bridge taper modules are designed for symmetric planar c...
Integrated polymer photonics is efficient and cheap solution for many applications, such as optical ...
Integrated polymer photonics is efficient and cheap solution for many applications, such as optical ...
The paper deals with considerations concerning planar waveguide structures, in which the polymer SU8...
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...
We present the focused-ion-beam fabrication of slots in silicon waveguides and racetrack resonators....
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...
Focused ion beam (FIB) etching is receiving increasing attention for the fabrication of active integ...