Realization and characterization of diamond micro-transducers for bio-chemical sensing

International audienceWe report on novel MEMS micro-transducers made of diamond and used for bio-sensing applications. To overcome the non straightforward micro-machining of diamond, we developed an original process involving the patterned growth of diamond using the CVD (chemical vapour deposition) technique, inside micro-machined silicon moulds.Typical MEMS structures were successfully fabricated and include cantilevers and bridges. They were actuated using Laplace forces. The structures were characterized by measuring their first mode resonance (frequency and Q-factor) using laser interferometry. The measured data fitted the simulated data and comparison with equivalent silicon structures showed the superior resonant properties of diamond cantilevers. It implies that the later are potentially more sensitive transducers than their silicon counterpart