Plasmadynamic synthesis in the Si-C-N-O system

The present work is aimed at studying the possibility of synthesizing nanodispersed particles in the Si-C-N-O system and then studying the resulting synthesis products. Three series of experiments were carried out under different atmospheres of the reactor chamber: air, air + argon, argon. The possibility of synthesis of particles of the ternary Si-C-N system was considered. In the course of the study, it was found that, in the air atmosphere of the reactor chamber, the production of silicon carbonitride particles is not feasible due to the oxidation of precursor phases. The result was the production of nanodispersed particles of cubic silicon carbide, which were obtained by the method of plasmadynamic synthesis in a hyper-velocity jet silicon-carbon plasma. The obtained products were subjected to a thermal analysis. During the thermal analysis, the most optimal annealing temperature range was found to be 600-700 °C. Annealing at this temperature in air allows the synthesis product to be eliminated from the unreacted carbon phase