Float-zone silicon has been long assumed to be bulk defect free and stable. Nevertheless, recently it was found that upon annealing between 450 °C to 700 °C detrimental defects can be activated in this material. Previous studies via deep level transient spectroscopy have identified several defect levels. However, it is still not clear which of these levels have a substantial impact on the minority carrier lifetime. In this study, we determine the recombination parameters of the dominant defect level using a combination of deep level transient spectroscopy and temperature and injection dependent lifetime spectroscopy. Additionally, we investigated the effect of hydrogenation on the thermally activated defects in ntype float-zone silicon.</p
The ongoing downscaling of microelectronic devices requires dopant activation with diffusion kept to...
The generation rates and annealing behavior of the irradiation defects in n- and p-type hydrogen-gro...
Hydrogen related defects in high purity n-type float zone silicon samples have been studied by means...
Float-zone silicon has been long assumed to be bulk defect free and stable. Nevertheless, recently i...
Abstract—A recombination active defect is found in as-grown high-purity floating zone n-type silicon...
A recombination active defect is found in as-grown high-purity floating zone n-type silicon wafers c...
Understanding the origins of the phenomena that limit the minority carrier lifetime in float-zone-gr...
Float-zone (FZ) silicon is usually assumed to be bulk defect-lean and stable. However, recent studie...
Float zone silicon (FZ-Si) is typically assumed to be an extremely high quality material, with high ...
Float-zone (FZ) silicon often has grown-in defects that are thermally activated in a broad temperatu...
This paper compares the electrically active damage in dry-etched n-type float-zone silicon, using NF...
A recombination active defect is found in as-grown high-purity floating zone n-type silicon wafers c...
In this study, we investigate the nature of some recombination active defects limiting the lifetime ...
AbstractIn this study, we investigate the nature of some recombination active defects limiting the l...
Recombination active defects are found in as-grown high-purity Czochralski (Cz) and Floating Zone (F...
The ongoing downscaling of microelectronic devices requires dopant activation with diffusion kept to...
The generation rates and annealing behavior of the irradiation defects in n- and p-type hydrogen-gro...
Hydrogen related defects in high purity n-type float zone silicon samples have been studied by means...
Float-zone silicon has been long assumed to be bulk defect free and stable. Nevertheless, recently i...
Abstract—A recombination active defect is found in as-grown high-purity floating zone n-type silicon...
A recombination active defect is found in as-grown high-purity floating zone n-type silicon wafers c...
Understanding the origins of the phenomena that limit the minority carrier lifetime in float-zone-gr...
Float-zone (FZ) silicon is usually assumed to be bulk defect-lean and stable. However, recent studie...
Float zone silicon (FZ-Si) is typically assumed to be an extremely high quality material, with high ...
Float-zone (FZ) silicon often has grown-in defects that are thermally activated in a broad temperatu...
This paper compares the electrically active damage in dry-etched n-type float-zone silicon, using NF...
A recombination active defect is found in as-grown high-purity floating zone n-type silicon wafers c...
In this study, we investigate the nature of some recombination active defects limiting the lifetime ...
AbstractIn this study, we investigate the nature of some recombination active defects limiting the l...
Recombination active defects are found in as-grown high-purity Czochralski (Cz) and Floating Zone (F...
The ongoing downscaling of microelectronic devices requires dopant activation with diffusion kept to...
The generation rates and annealing behavior of the irradiation defects in n- and p-type hydrogen-gro...
Hydrogen related defects in high purity n-type float zone silicon samples have been studied by means...