Thermal pressure high temperature gradient micro-sensor for aerodynamic measurements

Ce papier présente un capteur de pression basé sur l'effet Pirani, pour des applications de mesures aérodynamiques.International audienceThis paper presents a thermal based micro-sensor designed for pressure measurements for application in aerodynamics. The sensor is a thermistor based transducer operating with the Pirani effect, exploiting the pressure-dependency of the thermal conductivity of a gas. The sensor presents a wide measurement range between 10 kPa and about 800 kPa, in both constant current and constant temperature mode. It reached in CT mode high-sensitive measurements with a maximum of sensitivity around atmospheric pressure. It is therefore valuable for applications in aerodynamics and fluid dynamics, like active flow control