Mechanical microsensors for pulse measurement

International audienceThis paper presents a low cost flexible sensor that has been characterized by a homemade circuit. The technological process of the sensor was carried out at low temperature (180 °C) allowing to fabricate them on many types of substrates including flexible. As piezoresistive materials, N-type doped microcrystalline silicon deposited by PECVD was used. In order to obtain a good sensitivity to deformation, different designs were studied. Sensors are able to response to variable frequencies and different excitation waves such as a simple delta pulse or complex signals like the ECG wave. Several geometries are compared with the aim of obtaining the most sensitive design. This shows the feasibility and development of a highly sensitive system for small deformation measurements. ©The Electrochemical Society