A Review of silicon carbide development in MEMS applications

Due to its desirable material properties, Silicon Carbide (SiC) hasbecome an alternative material to replace Si for MicroelectromechanicalSystems (MEMS) applications in harsh environments. To promote SiC MEMSdevelopment towards future cost-effective products, main technology areas inmaterial deposition and processes have attracted significant interest. Thedevelopments in these areas have contributed to the rapid emergence of SiCMEMS prototypes. In this paper, we give an overview of the importantdevelopments in SiC material formation and fabrication processes in recentyears. Some of the most interesting state-of-the-art SiC MEMS devices arereviewed. This highlights the major progresses in SiC MEMS developed thusfar. This paper also looks into the prospect of SiC MEMS drawing attention topotential issues