The book describes theoretical and practical works of key technology issues for microelectronic fabrication and introduces the technology computer-aided design (TCAD) simulation tools to the reader. Examples of computer simulations provide a technically accurate introduction to advanced semiconductor manufacturing technologies: epitaxial growth, thermal oxidation, thermal diffusion and ion implantation, photolithography, etch, metallization. This publication has been produced with the financial assistance of Europe Social Fund and VGTU (Project No VP1-2.2-ŠMM-07-K-01-047). The book is a part of the project “The Essential Renewal of Undergraduates Study Programs of VGTU Electronics Faculty”
This book presents applicable knowledge of technology, equipment and applications, and the core econ...
Kitap, İstanbul Şehir Üniversitesi kütüphane koleksiyonunda mevcuttur."This book is the first of its...
Technology computer-aided design (TCAD) is an integral part of the development process of semiconduc...
Responding to recent developments and a growing VLSI circuit manufacturing market, Technology Comput...
Technology computer-aided design, or TCAD, is critical to today’s semiconductor technology and anybo...
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RT...
Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sess...
Semiconductor technologies continue to evolve and amaze us. New materials, new structures, new manuf...
This book discusses fundamental semiconductor physics of devices and on-chip interconnections for ph...
Simulation of microelectronic processes plays a pivotal role in area of Very Large Scale Integration...
The first book to deal with a broad spectrum of process and device design, and modelling issues rela...
This paper presents a modelling and simulation study of advanced semiconductor devices. Different Te...
Semiconductor devices have come a long way since the invention of the point contact transistor in 19...
The main objective of this book is to establish a solid instructional platform about simulation proc...
This book presents applicable knowledge of technology, equipment and applications, and the core econ...
This book presents applicable knowledge of technology, equipment and applications, and the core econ...
Kitap, İstanbul Şehir Üniversitesi kütüphane koleksiyonunda mevcuttur."This book is the first of its...
Technology computer-aided design (TCAD) is an integral part of the development process of semiconduc...
Responding to recent developments and a growing VLSI circuit manufacturing market, Technology Comput...
Technology computer-aided design, or TCAD, is critical to today’s semiconductor technology and anybo...
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RT...
Introduces the theory and technology of integrated-circuit fabrication. Lectures and laboratory sess...
Semiconductor technologies continue to evolve and amaze us. New materials, new structures, new manuf...
This book discusses fundamental semiconductor physics of devices and on-chip interconnections for ph...
Simulation of microelectronic processes plays a pivotal role in area of Very Large Scale Integration...
The first book to deal with a broad spectrum of process and device design, and modelling issues rela...
This paper presents a modelling and simulation study of advanced semiconductor devices. Different Te...
Semiconductor devices have come a long way since the invention of the point contact transistor in 19...
The main objective of this book is to establish a solid instructional platform about simulation proc...
This book presents applicable knowledge of technology, equipment and applications, and the core econ...
This book presents applicable knowledge of technology, equipment and applications, and the core econ...
Kitap, İstanbul Şehir Üniversitesi kütüphane koleksiyonunda mevcuttur."This book is the first of its...
Technology computer-aided design (TCAD) is an integral part of the development process of semiconduc...