Fabrication processes of MEMS phase shifters on polymer-based substrates

RF phase shifters find wide applications in telecommunications, satellite systems, personal wireless communication systems, radar systems, tracking systems, and sensors. They have been conventionally manufactured by semiconductor technologies which suffer from high insertion losses due to high RF series resistances. They are expensive due to fabrication and assembly costs. The RF MEMS phase shifters provide low insertion losses, low fabrication costs and high linearity compared with the semiconductor ones. Furthermore, polymer materials have demonstrated low material costs and low RF attenuations. In this work, we proposed to build RF MEMS phase shifters on polymer substrates. The proposed devices were successfully manufactured and tested from DC to 26 GHz. Our experimental results indicated more than 35 degrees phase shifts and low insertion losses. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.Applied Science, Faculty ofMechanical Engineering, Department ofReviewedFacult