Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization
- Barat, David
- Bardinal, Véronique
- Dika, I.
- Soppera, O.
- Rumyantseva, Anna
- Reig, Benjamin
- Renaud, Mickaël
- Bruyant, Aurélien
- Doucet, Jean Baptiste
- Camps, Thierry
- Malval, J.P.
- Daran, Emmanuelle
DOIAbstract
International audienceWe report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed
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