The presence of acoustic cavitation in the cleaning liquid is a crucial precondition for cleaning action. One can achieve enhanced cleaning by periodically switching the ultrasonic agitation on and off rather than sonicating the liquid in a continuous fashion. The physical effects leading to that improvement are investigated experimentally with a dedicated setup and correlated to cleaning results obtained in an experimental cleaning tank. With the first setup, sonoluminescence and cavitation noise are measured simultaneously while imaging the nucleation and the interaction of the bubbles with the sound field using Hi-Speed Stroboscopic Schlieren Imaging. In this way it is possible to identify the role of streamer bubbles and transient cavit...
Over the years, megasonic energy has been widely used in the semiconductor industry for effective pa...
Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An ...
This thesis shows that through microfabrication techniques, an improved efficiency of sono-reactors ...
The occurrence of acoustic cavitation in the cleaning liquid is a crucial precondition for the perfo...
The occurrence of acoustic cavitation is incorporating a multitude of interdependent effects that st...
Megasonic cleaning as applied in leading edge semiconductor device manufacturing strongly relies on ...
Within the last decade, the semiconductor industry has overstepped the frontier between micro- and n...
As the semiconductor manufacturing technology for ultra-high integration devices continue to shrink ...
Various industrial processes such as sonochemical processing and ultrasonic cleaning strongly rely o...
With many emerging applications such as chemical reactions and ultrasound therapy, acoustic cavitati...
With many emerging applications such as chemical reactions and ultrasound therapy, acoustic cavitati...
Changes in the cavitation intensity of gases dissolved in water, including H2, N2, and Ar, have been...
This paper described the experimental studies on the de-fouling mechanism of acoustic cavitation bub...
This paper described the experimental studies on the de-fouling mechanism of acoustic cavitation bub...
Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An ...
Over the years, megasonic energy has been widely used in the semiconductor industry for effective pa...
Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An ...
This thesis shows that through microfabrication techniques, an improved efficiency of sono-reactors ...
The occurrence of acoustic cavitation in the cleaning liquid is a crucial precondition for the perfo...
The occurrence of acoustic cavitation is incorporating a multitude of interdependent effects that st...
Megasonic cleaning as applied in leading edge semiconductor device manufacturing strongly relies on ...
Within the last decade, the semiconductor industry has overstepped the frontier between micro- and n...
As the semiconductor manufacturing technology for ultra-high integration devices continue to shrink ...
Various industrial processes such as sonochemical processing and ultrasonic cleaning strongly rely o...
With many emerging applications such as chemical reactions and ultrasound therapy, acoustic cavitati...
With many emerging applications such as chemical reactions and ultrasound therapy, acoustic cavitati...
Changes in the cavitation intensity of gases dissolved in water, including H2, N2, and Ar, have been...
This paper described the experimental studies on the de-fouling mechanism of acoustic cavitation bub...
This paper described the experimental studies on the de-fouling mechanism of acoustic cavitation bub...
Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An ...
Over the years, megasonic energy has been widely used in the semiconductor industry for effective pa...
Single-wafer cleaning based on megasonic nozzle systems can be used for removing nano-particles. An ...
This thesis shows that through microfabrication techniques, an improved efficiency of sono-reactors ...