Design and realisation of an optical bi-axial miniature inclination sensor

This paper presents the design and realization of an optical bi-axial miniature inclination sensor. This sensor determines its rotation based on the movement of a mass under the influence of the gravity field. The movement of the mass is measured optically in two directions using a PSD and LED. The key focus with this sensor is the integration of all mechanical functions in one monolithic structure. Not only both axes are integrated in one symmetrical structure, but also the housing and the emergency stops are made of the same piece. This results in a complex three-dimensional structure, machined by wire-EDM and micro-EDM. The final bi-axial inclination sensor has a size of 9mm × 9mm × 11.5mm and a resolution of 0.1 degrees.status: publishe