Add to ORKGInternational audienceWe report a new, fast and versatile method to fabricate nanochannels with non-uniform depth in a single step, in the range 50-500nm. The process is based on maskless laser lithography to structure a photosensitive resist (PR). The lateral dimension can be as small as 2µm. Functional nanofluidic chips with slopes, steps, and pore networks mimicking a nanoporous medium were fabricated and tested
Abstract: Nanofluidic devices have great potential for applications in areas ranging from renewable ...
In this work, we propose an innovative approach to the fabrication of a complete micro/nano fluidic ...
Nanofluidics is supposed to take advantage of a variety of new physical phenomena and unusual effect...
International audienceWe report a new, fast and versatile method to fabricate nanochannels with non-...
We report a new, fast and versatile method to fabricate nanochannels with non-uniform depth in a sin...
International audienceA method is reported to fabricate silicon-glass nanofluidic chips with non-uni...
This paper introduced a wafer-scale fabrication approach for the preparation of nanochannels with hi...
Nanofluidics is the science and technology involving a fluid flowing in or around structures with a ...
Figure 1. A scheme of nanochannel fabrication with roof collapsed mask. PDMS mask has a nanoslit pat...
Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale...
Photolithography of multi-level channel features in microfluidics is laborious and/or costly. Graysc...
Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale...
Two new methods have been developed to fabricate nanochannels by conventional micromachining. We suc...
We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas ...
In this paper a method is proposed to fabricate channels for fluidic applications with a depth in th...
Abstract: Nanofluidic devices have great potential for applications in areas ranging from renewable ...
In this work, we propose an innovative approach to the fabrication of a complete micro/nano fluidic ...
Nanofluidics is supposed to take advantage of a variety of new physical phenomena and unusual effect...
International audienceWe report a new, fast and versatile method to fabricate nanochannels with non-...
We report a new, fast and versatile method to fabricate nanochannels with non-uniform depth in a sin...
International audienceA method is reported to fabricate silicon-glass nanofluidic chips with non-uni...
This paper introduced a wafer-scale fabrication approach for the preparation of nanochannels with hi...
Nanofluidics is the science and technology involving a fluid flowing in or around structures with a ...
Figure 1. A scheme of nanochannel fabrication with roof collapsed mask. PDMS mask has a nanoslit pat...
Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale...
Photolithography of multi-level channel features in microfluidics is laborious and/or costly. Graysc...
Nanofluidic devices have typically explored a design space of patterns limited by a single nanoscale...
Two new methods have been developed to fabricate nanochannels by conventional micromachining. We suc...
We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas ...
In this paper a method is proposed to fabricate channels for fluidic applications with a depth in th...
Abstract: Nanofluidic devices have great potential for applications in areas ranging from renewable ...
In this work, we propose an innovative approach to the fabrication of a complete micro/nano fluidic ...
Nanofluidics is supposed to take advantage of a variety of new physical phenomena and unusual effect...