A New Generation of SnO2 gas sensor for agro-industrial applications

International audienceA new generation of gas sensor which consists of a silicon platform with an integrated polysilicon resistor as heater and a nanoparticular SnO2 sensitive layer has been developed and characterized. Methods of deposition and oxidation of the sensitive layer on the substrate were first optimized. Then, a demonstrator was implemented to evaluate the sensor's electrical behaviour under controlled atmospheric conditions. An electrical circuit has been developed to model the electrical behaviour of the sensor. Comparisons between PSPICE simulations and experimental data shows close agreement