Cost-effective processing of a piezoresistive MEMS cantilever sensor

In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and each processing step is explained in detail. Results from electrical probing and mechanical strength test are given. The results demonstrate that the chosen low-cost processing route results in high yield and a mechanical robust device