Elaboration of Nanocomposite Coatings by Coupling Aerosol Jets and Physical Vapour Deposition

International audienceWe propose a generic method for the elaboration, in asingle step and in a confined chamber, of nanocompositecoatings consisting of nanoparticles (NP) from 4 to 100nm, homogeneously distributed in a matrix. The processcombines the jet of nanoparticles in vacuum (JNV)technology and Physical Vapor Deposition (PVD). Thehybridization of these two techniques is made possibleby routing nanoparticles in the aerosol form to thesubstrate, either immediately after their synthesis in thegas phase, or from colloidal suspensions. Thesimultaneous deposition of the particles and the matrix isachieved on the same face of the same substrate. Theprocess is innovative in that it allows an unlimitedselection in the respective chemical compositions ofnanoparticles and the matrix, and a moderatetemperature of the substrate. The general scheme of theprocess is presented in Figure 1a. A laser-drivenpyrolysis reactor can be used for in-situ synthesis ofnanoparticles. Laser pyrolysis is an efficient method tosynthesize various high purity nanopowders, oxides andnon-oxides, in a gas phase bottom-up approach [1]. Anatomizer that produces aerosol from colloidal suspensionof previously synthesized nanoparticles can also be used.The JNV is obtained by the use of anaerodynamic lens system, which is composed ofchambers separated by diaphragms, which produces acollimated beam of nanoparticles under vacuum [2]. Thiskind of beam is currently used for gas phasecharacterization of freestanding nanoparticles or forprecision 3D printing with a high deposition rate. Weshow that it is possible to obtain an angle-controlleddivergent and homogenous jet of nanoaerosols, as well,by changing the geometry of a classical lens. Wedemonstrate the adaptation if the JNV technique withpressure environment required for running a classicalmagnetron sputtering device. The later is used fordepositing, on the same substrate and in the same time,the material constituting the matrix of the compositefilm.The possibility to elaborate large and homogenousnanostructured films were investigated with differenttypes of nanoaerosols with different sizes and densities.Samples composed of gold and silicon nanoparticles (seeFigure 1b) will be shown. Many applications are alreadyconsidered for this type of coatings, includingphotovoltaic, aesthetic coatings for luxury industry, hardcovering for tools or self-healing films