130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements
- Schwab, Lucien
- Allain, Pierre-Etienne
- Banniard, Louise
- Mauran, Nicolas
- Lagrange, Denis
- Fafin, Alexandre
- Gély, Marc
- Hermouet, Maxime
- Jourdan, Guillaume
- Hentz, Sebastien
- Favero, Ivan
- Legrand, Bernard
Publication date
January 2019
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
International audienceWe show all-optical operation of a VLSI optomechanical micro-resonator designed for high resolution sensing applications. Mechanical resonance frequency is above 100 MHz with Q-factor of 1 000 in air, yielding measurement bandwidth above 100 kHz. We demonstrate low thermomechanical noise floor resolved with exquisite motion detection limit down to 4.10 -16 m.Hz -0.5 . This performance, enabled by optomechanical transduction, paves the way for very high-speed and ultra-sensitive sensing applications
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