Numerical simulations of nanosecond laser annealing of Si nanoparticles for plasmonic structures
- Royet, A-S.
- Kerdiles, S.
- Acosta Alba, P.
- Bonafos, Caroline
- Paillard, Vincent
- Cristiano, Fuccio
- Curvers, B.
- Huet, K.
Publication date
September 2019
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
International audienceThis paper reports numerical simulations of nanosecond laser thermal annealing of plasmonic structures based on Si-nanoparticles embedded in a SiO 2 matrix. From these simulations, we extracted guidelines for the structure design to be adopted. This study also investigates the expected laser annealing process window and the influence of nanoparticles coverage
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