Add to ORKGInternational audienceThis paper presents an overview of technologies of MEMS Cs microcells for CPT-based atomic clocks, obtained in FEMTO-ST Institute over the last decade. We discuss the challenges in microfabrication of miniature cells: the different configurations of cells, two methods for filling alkali vapor cells with Cs from a dispenser pill and from the dispensing paste, and a study on the permeability of our microcells to the buffer gas limiting the sealing performances. Finally, we report on the aging tests and resulting short-term and long-term clock stability measurements
Herein, a microfabricated millimeter-level vapor alkali cell with a high hermeticity is fabricated t...
International audienceWe report on the characterization of Cs vapor microfabricated cells filled wit...
This paper presents the latest progress in the development, fabrication, and characterization of mic...
International audienceOver the last decade, the progress of micro-electro-mechanical systems (MEMS) ...
International audienceWe report techniques based on cesium dispensers to fill microfabricated vapor ...
International audienceThis paper reports on the Si-glass anodic bonding process to fill micro Cs vap...
International audiencetWe report on the characterization of Cs vapor microcells based on pill dispen...
International audienceA method for filling alkali vapor cells with cesium from a dispensing paste is...
AbstractWe described the technology of MEMS caesium cell for European Micro-Atomic-Clock. The techno...
Nowadays, the portable atomic clocks with small size and low power consumption have attracted much a...
International audienceNumerous effors in different laboratories and companies have been accomplish...
This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for mini...
International audienceWe report on the microfabrication and packaging of Cs-vapor cells filled with ...
Nowadays, the portable atomic clocks with small size and low power consumption have attracted much a...
International audienceWe describe the fabrication of wafer-scale alkali vapor cells based on silicon...
Herein, a microfabricated millimeter-level vapor alkali cell with a high hermeticity is fabricated t...
International audienceWe report on the characterization of Cs vapor microfabricated cells filled wit...
This paper presents the latest progress in the development, fabrication, and characterization of mic...
International audienceOver the last decade, the progress of micro-electro-mechanical systems (MEMS) ...
International audienceWe report techniques based on cesium dispensers to fill microfabricated vapor ...
International audienceThis paper reports on the Si-glass anodic bonding process to fill micro Cs vap...
International audiencetWe report on the characterization of Cs vapor microcells based on pill dispen...
International audienceA method for filling alkali vapor cells with cesium from a dispensing paste is...
AbstractWe described the technology of MEMS caesium cell for European Micro-Atomic-Clock. The techno...
Nowadays, the portable atomic clocks with small size and low power consumption have attracted much a...
International audienceNumerous effors in different laboratories and companies have been accomplish...
This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for mini...
International audienceWe report on the microfabrication and packaging of Cs-vapor cells filled with ...
Nowadays, the portable atomic clocks with small size and low power consumption have attracted much a...
International audienceWe describe the fabrication of wafer-scale alkali vapor cells based on silicon...
Herein, a microfabricated millimeter-level vapor alkali cell with a high hermeticity is fabricated t...
International audienceWe report on the characterization of Cs vapor microfabricated cells filled wit...
This paper presents the latest progress in the development, fabrication, and characterization of mic...