mor4ANSYS: Efficient Model Order Reduction of Finite Element Electro-Thermal MEMS Models

In this paper we present a methodology for applying mathematical model order reduction (MOR) to electro-thermal MEMS models. We have applied MOR to successfully create dynamic compact thermal models (DCTM) of several novel MEMS devices. It is currently possible to use software tool mor4ANSYS to automatically create reduced order thermal models, directly from ANSYS models with more than 100,000 degrees of freedom. Model order reduction is automatic and based on the Pade approximation of the transfer function via the Arnoldi algorithm. Reduced models are easily convertible into hardware description language form, and can be directly used for system-level simulation. We have tested them using SABER simulator.