Industrial CMOS technology for the integration of optical metrology systems (photo-ASICs

With ‘photo-ASKS ’ comprlsmg hght-sensitive structures, hght-emmmg devices and analog and chgtal clrcults, complete optlcal metrology systems can be Integrated on a smgle chip We report the reahzatlon of key components of such photo-ASICs usmg an mdustrual IC CMOS process We achieve photodlodes with an external quantum efficiency of 50-80 % m the visible spectrum and posItIon-sensltlve devices (PSDs) with a spatial non-hneanty of around 0 3 % We demonstrate surface-channel CCDs with a charge-transfer efficiency of 99 8 % at room tempera-ture, as well as bucket-bngade devices (BBDs) with a lower charge-transfer efficiency of 96 % Light-emlttmg diodes (LEDs) are reahzed, emlttmg Infrared hght at 1160 nm (forward blased) and broadband vlslble yellow light with a spectral maximum at 640 nm (reverse biased) We discuss simple apphcatlons of passive photo-ASKS, such as a centrmd detector, a 3-D camera, a motion detector and a focus sensor, used to obtam a relative measure for the local focus of an optically Imaged scene, for example, m a photographic camera 1