On-chip actuation for waveguide alignment

Recent decades have seen impressive developments in the field of integratedphotonics. Chips with complex photonic functionality can presently be designedand fabricated. Photonic packages consist of one or more PICs, as well as other(micro-optical) components, and a fibre (array) to establish the external opticalinterface. A core challenge is the assembly and packaging of these complexdevices, involving sub-μm alignment of components. To overcome thelimitations in multi-chip photonic packaging, a concept is proposed which useson-chip actuators for the fine-alignment of flexible waveguide structures.Micro and Nano Engineerin