The switching speed of a micromachined switch is calculated by using elastic beam as well as thin plate models. The effect of pre-tightening to achieve higher eigenfrequency of the deflected member is also investigated. A performance parameter is introduced to describe the functioning of the switch in order to take into account not only fast switching, but also the necessary pull-in voltage for the device. Three switch-configurations are analyzed by finite elements and optimum geometrical parameters were searched
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
RF power-handling capacity of micro-electromechanical capacitive switches was modeled by multiphysic...
The switching speed of a micromachined switch is calculated by using elastic beam as well as thin pl...
A well designed capacitive micro-machined switch requires small electrostatic pull-in force to easy ...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
The purpose of this paper is to design and characterize electrostatically actuated RF MEMS capacitiv...
Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components s...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components s...
This paper explains the reason behind pull-in time being more than pull-up time of many Radio Freque...
The design of RF MEMS switches involves several disciplines: mechanics, materials science and electr...
This paper explains the reason behind pull-in time being more than pull-up time of many Radio Freque...
RF power-handling capacity of micro-electromechanical capacitive switches was modeled by multiphysic...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
RF power-handling capacity of micro-electromechanical capacitive switches was modeled by multiphysic...
The switching speed of a micromachined switch is calculated by using elastic beam as well as thin pl...
A well designed capacitive micro-machined switch requires small electrostatic pull-in force to easy ...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
The purpose of this paper is to design and characterize electrostatically actuated RF MEMS capacitiv...
Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components s...
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electrom...
Radio-frequency Microelectromechanical Systems (RFMEMs) are collections of micro-scaled components s...
This paper explains the reason behind pull-in time being more than pull-up time of many Radio Freque...
The design of RF MEMS switches involves several disciplines: mechanics, materials science and electr...
This paper explains the reason behind pull-in time being more than pull-up time of many Radio Freque...
RF power-handling capacity of micro-electromechanical capacitive switches was modeled by multiphysic...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive...
RF power-handling capacity of micro-electromechanical capacitive switches was modeled by multiphysic...