Add to ORKGWe report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator
The past few decades have witnessed the ultra-fast development of wireless telecommunication systems...
Modelling and development of high Q thin-film bulk acoustic wave (BAW) devices is a topic of researc...
Integration possibilities of BaxSr1-xTiO3 (BST) based tunable Thin Film Bulk Acoustic Wave Resonato...
Continuous advancement in wireless technology and silicon microfabrication has fueled exciting growt...
<div><p class="abstract"><strong><em>ABSTRACT</em></strong><strong><em>:</em></strong> Continuous ad...
Layers of porous silicon with a varying degree of porosity between 30% and 75% were prepared by elec...
This work describes the performance of AlN-based bulk acoustic wave resonators built on top of insul...
Thin-film bulk-acoustic-wave (BAW) devices are used for RF selectivity in mobile communication syste...
Passive acoustic devices are enabling elements for RF architectures. Aside from the well known surfa...
Abstract- This paper presents a review of single crystal silicon bulk acoustic wave resonators and f...
Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physic...
We describe the use of bulk acoustic mode in micromechanical silicon resonators operating at radio f...
This paper reports the simultaneous fabrication of Receive and Transmit Bulk Acoustic Wave filters f...
The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, ...
This thesis proposes a novel design method for optimizing bulk acoustic wave (BAW) resonators, inclu...
The past few decades have witnessed the ultra-fast development of wireless telecommunication systems...
Modelling and development of high Q thin-film bulk acoustic wave (BAW) devices is a topic of researc...
Integration possibilities of BaxSr1-xTiO3 (BST) based tunable Thin Film Bulk Acoustic Wave Resonato...
Continuous advancement in wireless technology and silicon microfabrication has fueled exciting growt...
<div><p class="abstract"><strong><em>ABSTRACT</em></strong><strong><em>:</em></strong> Continuous ad...
Layers of porous silicon with a varying degree of porosity between 30% and 75% were prepared by elec...
This work describes the performance of AlN-based bulk acoustic wave resonators built on top of insul...
Thin-film bulk-acoustic-wave (BAW) devices are used for RF selectivity in mobile communication syste...
Passive acoustic devices are enabling elements for RF architectures. Aside from the well known surfa...
Abstract- This paper presents a review of single crystal silicon bulk acoustic wave resonators and f...
Bulk acoustic wave (BAW) resonators are widely applied in filters and gravimetric sensors for physic...
We describe the use of bulk acoustic mode in micromechanical silicon resonators operating at radio f...
This paper reports the simultaneous fabrication of Receive and Transmit Bulk Acoustic Wave filters f...
The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, ...
This thesis proposes a novel design method for optimizing bulk acoustic wave (BAW) resonators, inclu...
The past few decades have witnessed the ultra-fast development of wireless telecommunication systems...
Modelling and development of high Q thin-film bulk acoustic wave (BAW) devices is a topic of researc...
Integration possibilities of BaxSr1-xTiO3 (BST) based tunable Thin Film Bulk Acoustic Wave Resonato...