Optimizing scanning mirror system performance using solid state piezoelectric actuators

The purpose of this thesis is to design a scanning mirror system using piezoelectric actuators. A dual-cantilevered bimorph electromechanical coupling is presented, which maximizes the amount of angular deflection possible with an applied field. Two types of feedback methods are employed: rate sensing, which provides resonance damping, and position sensing for increased bandwidth and decreased hysteresis. A prototype system, including the actuator and feedback mechanisms, is developed. Its performance compares favorably with its model and is capable of plus and minus five degrees of angular deflection with a bandwidth of 300 Hertz