Super resolution hybrid analog-digital optical beam profiler using digital micromirror device

Demonstrated for the first time is a hybrid analog-digital laser beam profiler based on analog fine motion of a digital micromirror device (DMD) and within-chip digital micromirror controls. The profiler can operate with high-power watt-level laser beams, providing both submicron-level high resolution and wide area profiling coverage. The demonstrated profiler tested over a 600-mu m zone using a 1550-nm Gaussian beam shows a 2-mu m profiling edge movement resolution limited by the analog motion mechanics