Add to ORKGLaser-produced plasmas are one of the most likely sources to be used for soft x-ray projection lithography. The characteristics of these sources are described in terms of the expected radiation efficiency within the illumination bandwidth of a lithographic system. Measurements of the plasma particulate emission are described and techniques for interdicting this emission before it reaches the illumination optics are discussed. The laser requirements are obtained for a lithographic system producing a wafer rate of 60, 6 in. wafers per hour
Abstract—We report soft X-ray interferograms that illustrate the use of a very compact table-top sof...
Extending lasing action into the extreme ultraviolet and soft x-ray regions of the electromagnetic s...
We describe a special filter design that produces spectrally narrow soft-x-ray radiation by using a ...
Laser-produced plasmas are one of the most likely sources to be used for soft x-ray projection litho...
Laser plasmas are intrinsically an attractive soft-x-ray source for projection lithography. Compact,...
Laser pulses of 15 ns and less than 3 J at 1064 nm and less than 1.2 J at 532 nm were focused onto s...
Results are reported concerning high-repetition-rate excimer lasers with average powers up to 415 W ...
Results are reported concerning high-repetition-rate excimer lasers with average powers up to 415 W ...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
The brilliance of a laser-produced soft X-ray source is enhanced for gaseous target concepts. In con...
A method is described to determine the soft X-ray emission of pulsed plasma sources for X-ray lithog...
During the fiscal years 92-94 a joint group from Sandia/New Mexico and Sandia/California studied the...
We report results of soft X-ray measurements in which a high-power (10 10 –10 11 W/cm 2 ) CO 2 laser...
This work comprehensively describes the design, build and characterisation of a low-debris laser dri...
Abstract—We report soft X-ray interferograms that illustrate the use of a very compact table-top sof...
Extending lasing action into the extreme ultraviolet and soft x-ray regions of the electromagnetic s...
We describe a special filter design that produces spectrally narrow soft-x-ray radiation by using a ...
Laser-produced plasmas are one of the most likely sources to be used for soft x-ray projection litho...
Laser plasmas are intrinsically an attractive soft-x-ray source for projection lithography. Compact,...
Laser pulses of 15 ns and less than 3 J at 1064 nm and less than 1.2 J at 532 nm were focused onto s...
Results are reported concerning high-repetition-rate excimer lasers with average powers up to 415 W ...
Results are reported concerning high-repetition-rate excimer lasers with average powers up to 415 W ...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
In this paper we present the status of a joint development programme on soft x-ray projection lithog...
The brilliance of a laser-produced soft X-ray source is enhanced for gaseous target concepts. In con...
A method is described to determine the soft X-ray emission of pulsed plasma sources for X-ray lithog...
During the fiscal years 92-94 a joint group from Sandia/New Mexico and Sandia/California studied the...
We report results of soft X-ray measurements in which a high-power (10 10 –10 11 W/cm 2 ) CO 2 laser...
This work comprehensively describes the design, build and characterisation of a low-debris laser dri...
Abstract—We report soft X-ray interferograms that illustrate the use of a very compact table-top sof...
Extending lasing action into the extreme ultraviolet and soft x-ray regions of the electromagnetic s...
We describe a special filter design that produces spectrally narrow soft-x-ray radiation by using a ...