Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form a point source EUV, XUV and x-ray source. Various types of liquid droplet targets include metallic solutions, and nano-sized particles in solutions having a melting temperature lower than the melting temperature of some or all of the constituent metals, used a laser point source target droplets. The solutions have no damaging debris and can produce plasma emissions in the X-rays, XUV, and EUV(extreme ultra violet) spectral ranges of approximately 0.1 nm to approximately 100 nm, approximately 11.7 nm and 13 nm, approximately 0.5 nm to approximately 1.5 nm, and approximately 2.3 nm to approximately 4.5 nm. The second type of target consists of...
We are developing a mass-limited, laser plasma target concept that utilizes excited state transition...
The development of a laser-plasma EUV line emission source based on frozen water droplet targets whi...
Extreme Ultraviolet (EUV) sources rely on droplet laser plasmas for EUV generation. These sources co...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
We have configured a new type of target for laser plasma x-ray generation. This target consists of a...
A laser-plasma EUV radiation source that generates larger liquid droplets for the plasma target mate...
Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) developed in our laboratory for ap...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Liquid droplet-target laser plasma sources were presented for extreme ultraviolet lithography. A tar...
The droplet laser plasma source has many attractive features as a continuous, almost debris-free sou...
Light sources based on laser plasmas using tin as target material are known to provide high conversi...
We are developing a mass-limited, laser plasma target concept that utilizes excited state transition...
The development of a laser-plasma EUV line emission source based on frozen water droplet targets whi...
Extreme Ultraviolet (EUV) sources rely on droplet laser plasmas for EUV generation. These sources co...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
We have configured a new type of target for laser plasma x-ray generation. This target consists of a...
A laser-plasma EUV radiation source that generates larger liquid droplets for the plasma target mate...
Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) developed in our laboratory for ap...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Liquid droplet-target laser plasma sources were presented for extreme ultraviolet lithography. A tar...
The droplet laser plasma source has many attractive features as a continuous, almost debris-free sou...
Light sources based on laser plasmas using tin as target material are known to provide high conversi...
We are developing a mass-limited, laser plasma target concept that utilizes excited state transition...
The development of a laser-plasma EUV line emission source based on frozen water droplet targets whi...
Extreme Ultraviolet (EUV) sources rely on droplet laser plasmas for EUV generation. These sources co...