Add to ORKGAn EUV radiation source that includes a nozzle positioned a far enough distance away from a target region so that EUV radiation generated at the target region by a laser beam impinging a target stream emitted from the nozzle is not significantly absorbed by target vapor proximate the nozzle. Also, the EUV radiation does not significantly erode the nozzle and contaminate source optics. In one embodiment, the nozzle is more than 10 cm away from the target region
A laser-plasma, EUV radiation source that controls the target droplet delivery rate so that successi...
With the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region ...
A gas jet nozzle for an extreme-ultraviolet light source, including a housing having a front and bac...
An EUV radiation source that includes a nozzle positioned a far enough distance away from a target r...
A nozzle for a laser-plasma EUV radiation source that provides thermal isolation between the nozzle ...
An EUV radiation source that employs a low energy laser pre-pulse and high energy laser main pulse. ...
A target material delivery system in the form of a nozzle for an EUV radiation source. The nozzle in...
An EUV radiation source that creates a stable solid filament target. The source includes nozzle asse...
An EUV source that delivers a laser beam asymmetrical relative to first collection optics. The first...
Collector optics for an EUV radiation source for collecting EUV radiation. The collector optics incl...
An EUV radiation source that generates a sheet of a liquid target material that has a width that mat...
The development of a laser-plasma EUV line emission source based on frozen water droplet targets whi...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
A nozzle (46) for a laser-plasma EUV radiation source that provides thermal isolation between the no...
A laser-plasma EUV radiation source that generates larger liquid droplets for the plasma target mate...
A laser-plasma, EUV radiation source that controls the target droplet delivery rate so that successi...
With the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region ...
A gas jet nozzle for an extreme-ultraviolet light source, including a housing having a front and bac...
An EUV radiation source that includes a nozzle positioned a far enough distance away from a target r...
A nozzle for a laser-plasma EUV radiation source that provides thermal isolation between the nozzle ...
An EUV radiation source that employs a low energy laser pre-pulse and high energy laser main pulse. ...
A target material delivery system in the form of a nozzle for an EUV radiation source. The nozzle in...
An EUV radiation source that creates a stable solid filament target. The source includes nozzle asse...
An EUV source that delivers a laser beam asymmetrical relative to first collection optics. The first...
Collector optics for an EUV radiation source for collecting EUV radiation. The collector optics incl...
An EUV radiation source that generates a sheet of a liquid target material that has a width that mat...
The development of a laser-plasma EUV line emission source based on frozen water droplet targets whi...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
A nozzle (46) for a laser-plasma EUV radiation source that provides thermal isolation between the no...
A laser-plasma EUV radiation source that generates larger liquid droplets for the plasma target mate...
A laser-plasma, EUV radiation source that controls the target droplet delivery rate so that successi...
With the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region ...
A gas jet nozzle for an extreme-ultraviolet light source, including a housing having a front and bac...