Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form a point source EUV, XUV and x-ray source. Various types of liquid droplet targets include metallic solutions, and nano-sized particles in solutions having a melting temperature lower than the melting temperature of some or all of the constituent metals, used a laser point source target droplets. The solutions have no damaging debris and can produce plasma emissions in the X-rays, XUV, and EUV(extreme ultra violet) spectral ranges of approximately 0.1 nm to approximately 100 nm, approximately 11.7 nm and 13 nm, approximately 0.5 nm to approximately 1.5 nm, and approximately 2.3 nm to approximately 4.5 nm. The second type of target consists of...
Extreme ultraviolet lithography (EUVL) is a next generation lithographic techniques under developmen...
A laser-plasma, EUV radiation source that controls the target droplet delivery rate so that successi...
Several topics were studied in the interaction of intense laser pulses with droplet and cluster sour...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
A target material delivery system in the form of a nozzle for an EUV radiation source. The nozzle in...
The advancement of laboratory based Extreme Ultraviolet (EUV) radiation has escalated with the desir...
With the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region ...
We have configured a new type of target for laser plasma x-ray generation. This target consists of a...
An EUV radiation source that includes a nozzle positioned a far enough distance away from a target r...
Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) developed in our laboratory for ap...
A laser produced extreme ultraviolet (EUV) source based on a water droplet target has been implement...
Extreme ultraviolet lithography (EUVL) is a next generation lithographic techniques under developmen...
A laser-plasma, EUV radiation source that controls the target droplet delivery rate so that successi...
Several topics were studied in the interaction of intense laser pulses with droplet and cluster sour...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form...
Metallic solutions at room temperature used a laser point source target droplets. Using the target m...
A target material delivery system in the form of a nozzle for an EUV radiation source. The nozzle in...
The advancement of laboratory based Extreme Ultraviolet (EUV) radiation has escalated with the desir...
With the availability of high reflectivity multilayer mirrors and zone plate lenses, the EUV region ...
We have configured a new type of target for laser plasma x-ray generation. This target consists of a...
An EUV radiation source that includes a nozzle positioned a far enough distance away from a target r...
Laser plasma sources of soft x-rays and extreme ultraviolet (EUV) developed in our laboratory for ap...
A laser produced extreme ultraviolet (EUV) source based on a water droplet target has been implement...
Extreme ultraviolet lithography (EUVL) is a next generation lithographic techniques under developmen...
A laser-plasma, EUV radiation source that controls the target droplet delivery rate so that successi...
Several topics were studied in the interaction of intense laser pulses with droplet and cluster sour...