Liquid Sprays As the Target for a Laser Plasma EUV Light Source (EU)

A laser-plasma EUV radiation source that generates larger liquid droplets for the plasma target material. The EUV source forces a liquid, preferably Xenon, through a nozzle , instead of forcing a gas through the nozzle. The geometry of the nozzle and the pressure of the liquid through the nozzle atomizes the liquid to form a dense spray of droplets. Because the droplets are formed from a liquid, they are larger in size, and are more conducive to generating EUV radiation. A condenser is used to convert gaseous Xenon to the liquid prior to being forced through the nozzle