Magnetic Properties and Preparation of Bulk Amorphous Alloys by High Rate Sputter Deposition

A dc-triode sputtering technique has been applied to produce bulk amorphous alloys at very high deposition rate of 1000 up to 5000 A/min. About 0.3-0.5 mm thick disks or rings in the amorphous state have been obtained for several Transition Metals-Metalloids and Transition Metals-Rare Earth Metals systems. The construction of the equipment and the operating conditions for the production of amorphous alloys will be reported. The B-H hysteresis loops for Fe-B and Co-Fe-Si-B bulk amorphous deposits, free from substrate, have been measured. Alloy deposits of Co_Fe_5Si_B_ With nearly zero magnetostriction show extremely small coercivity of 0.002 Oe. The magnetic properties for bulk amorphous deposits of Mn_Nd_ and Fe rich Fe-La alloys are also reported