Add to ORKGIn this paper we report on results of extreme ultraviolet (EUV) free-electron laser ablation experiments. In the ablation experiments, we had evaluated the throughput energy of SACLA BL1, and confirmed the dependence on damage thresholds of pulse duration. In addition, the damage examinations of resists and multilayer mirrors had been evaluated and material dependent of threshold was confirmed.SACLA Users\u27 Meeting 201
The durability of grazing and normal incidence optical coatings has been experimentally assessed u...
To study the damage mechanism of EUV multilayers, we have performed irradiation experiments of SXRL ...
Ph.D. University of Hawaii at Manoa 2011.Includes bibliographical references.The free-electron laser...
The soft x-ray laser (SXRL) is one of attractive x-ray source for ablation study, because the ablati...
We have demonstrated the surface processing by use of single and multiple EUV-FEL irradiations. Abla...
The durability of grazing- and normal-incidence optical coatings has been experimentally assessed un...
In this paper, we report on development of the soft x-ray laser (SXRL) irradiation system at QST. Th...
In presentation, we report on development of an extreme ultraviolet (EUV) laser irradiation system a...
Compact extreme ultraviolet (EUV) laser sources can be used for laboratory-scale ablation experiment...
Extreme ultraviolet lithography (EUVL) is a next generation photolithographic technique that uses 13...
SPIE Laser Damage - 46th Annual Symposium on Optical Materials for High Power Lasers, National Insti...
We exposed standard Mo/Si multilayer coatings, optimized for 13.5 nm radiation to the intense femtos...
The interaction of an extreme ultraviolet (EUV) laser beam with a parylene foil was studied by exper...
A wide range laser pulse duration experiment is carried out including pulse durations from 250 femto...
International audienceThe paper is focused on the importance of accurate determination of surface da...
The durability of grazing and normal incidence optical coatings has been experimentally assessed u...
To study the damage mechanism of EUV multilayers, we have performed irradiation experiments of SXRL ...
Ph.D. University of Hawaii at Manoa 2011.Includes bibliographical references.The free-electron laser...
The soft x-ray laser (SXRL) is one of attractive x-ray source for ablation study, because the ablati...
We have demonstrated the surface processing by use of single and multiple EUV-FEL irradiations. Abla...
The durability of grazing- and normal-incidence optical coatings has been experimentally assessed un...
In this paper, we report on development of the soft x-ray laser (SXRL) irradiation system at QST. Th...
In presentation, we report on development of an extreme ultraviolet (EUV) laser irradiation system a...
Compact extreme ultraviolet (EUV) laser sources can be used for laboratory-scale ablation experiment...
Extreme ultraviolet lithography (EUVL) is a next generation photolithographic technique that uses 13...
SPIE Laser Damage - 46th Annual Symposium on Optical Materials for High Power Lasers, National Insti...
We exposed standard Mo/Si multilayer coatings, optimized for 13.5 nm radiation to the intense femtos...
The interaction of an extreme ultraviolet (EUV) laser beam with a parylene foil was studied by exper...
A wide range laser pulse duration experiment is carried out including pulse durations from 250 femto...
International audienceThe paper is focused on the importance of accurate determination of surface da...
The durability of grazing and normal incidence optical coatings has been experimentally assessed u...
To study the damage mechanism of EUV multilayers, we have performed irradiation experiments of SXRL ...
Ph.D. University of Hawaii at Manoa 2011.Includes bibliographical references.The free-electron laser...