Beam Alignment of Scanning Microbeam PIXE Analysis System in NIRS Electrostatic Accelerator Facility

The scanning microbeam PIXE(Particle Induced X-ray Emission) analysis allows identifying the several surface elements and taking the high-resolution elemental maps of the specimen at a time, by using the narrow beam downed the size to 1um and the maximum scanning area of 2mm square. We are applying this system to the elements and the structure analysis for bio-cells and environmental specimens. The most important procedure to obtain the high-resolution maps is increasing spatial resolution of the micorbeam. We diagnose the resolution by using Scanning Transmission Ion Microscopy (STIM) and PIXE images of the 12.5um pitch copper mesh. In this workshop, we introduce our experiences of the alignment of the microbeam system.The 4th Workshop on Accelerator Operatio