Impact of non-ideal shapes on high-contrast grating performance

In this work the impact of the fabrication nonidealities on the reflection features of dielectric high-contrast gratings (HCGs) is discussed. The grating performance is quantified considering the plane-wave scattering problem. This is solved by means of a novel full-wave simulator based on the mortar element method. The flexibility of this scheme is exploited to obtain a realistic model of a HCG. Several analyses aimed at evaluating the sensitivity of the device to the geometry parameters that are mostly affected by the fabrication process are presented