The influences of the oxygen concentration variation on the zinc oxide films structural properties were studied. ZnO films were deposited on silicon substrate by rf magnetron sputtering in reactive plasma using a zinc oxide target. They exhibited a c-axis orientation of below 0.32° FWHM of X-ray rocking curves, an extremely high resistivity of 1012 ?cm and an energy gap of 3.3 eV at room temperature. It was found that a substrate temperature of 100°C, very low gas pressures of 3.35x10-3 Torr in argon and oxygen mixed gas atmosphere giving to ZnO thin films a good homogeneity and a high crystallinity. Measurements of the ac conductivity properties of ZnO sandwich structures with silver and platinum electrodes are reported. The frequency depe...
c-axis oriented thin films of piezoelectric ZnO have been deposited on room-temperature substrates b...
Zinc oxide (ZnO) thin films were deposited on glass substrates by radio frequency magnetron sputteri...
The electronic and structural properties for RF magnetron sputtering deposited ZnO thin films grown ...
International audienceZnO thin films were deposited on sapphire, glass and silicon substrates by r.f...
Aluminium doped Zinc Oxide films were deposited on glass slide by RF magnetron sputtering using a Zn...
ZnO thin films were deposited onto quartz substrates by radio frequency (RF) reactive magnetron sput...
Zinc Oxide (ZnO) is an attractive semiconductor for various applications due to its direct wide band...
AbstractNano-structured zinc oxide thin films were deposited on corning glass substrate by magnetron...
The structural properties of r.f. planar magnetron sputtered ZnO films are studied as a function of ...
International audienceZnO films were grown on p-type Si substrates by radio-frequency magnetron sput...
International audienceZnO films were grown on p-type Si substrates by radio-frequency magnetron sput...
Transparent oxide semiconducting films have continued to receive considerable attention, from a fund...
Transparent oxide semiconducting films have continued to receive considerable attention, from a fund...
AbstractAluminum doped zinc oxide (AZO) thin films were prepared by direct current (DC) magnetron sp...
Piezoelectric zinc oxide films are used in microelectromechanical systems (MEMS) applications, where...
c-axis oriented thin films of piezoelectric ZnO have been deposited on room-temperature substrates b...
Zinc oxide (ZnO) thin films were deposited on glass substrates by radio frequency magnetron sputteri...
The electronic and structural properties for RF magnetron sputtering deposited ZnO thin films grown ...
International audienceZnO thin films were deposited on sapphire, glass and silicon substrates by r.f...
Aluminium doped Zinc Oxide films were deposited on glass slide by RF magnetron sputtering using a Zn...
ZnO thin films were deposited onto quartz substrates by radio frequency (RF) reactive magnetron sput...
Zinc Oxide (ZnO) is an attractive semiconductor for various applications due to its direct wide band...
AbstractNano-structured zinc oxide thin films were deposited on corning glass substrate by magnetron...
The structural properties of r.f. planar magnetron sputtered ZnO films are studied as a function of ...
International audienceZnO films were grown on p-type Si substrates by radio-frequency magnetron sput...
International audienceZnO films were grown on p-type Si substrates by radio-frequency magnetron sput...
Transparent oxide semiconducting films have continued to receive considerable attention, from a fund...
Transparent oxide semiconducting films have continued to receive considerable attention, from a fund...
AbstractAluminum doped zinc oxide (AZO) thin films were prepared by direct current (DC) magnetron sp...
Piezoelectric zinc oxide films are used in microelectromechanical systems (MEMS) applications, where...
c-axis oriented thin films of piezoelectric ZnO have been deposited on room-temperature substrates b...
Zinc oxide (ZnO) thin films were deposited on glass substrates by radio frequency magnetron sputteri...
The electronic and structural properties for RF magnetron sputtering deposited ZnO thin films grown ...