Electrostatic Analyzer ニ ヨル ハンノウセイ プラズマ ノ シンダン

This paper presents an electrostatic analyzer and its systems to measure densities of both ions and electrons impinging upon growing film surfaces and their energy distributions in a reactive plasma. The electrostatic analyzer consists of four electrodes spaced closely in comparison with electron and ion mean free paths, and is placed on the substrate holder of our ECR plasma reactor. A personal computor is adopted for automatically measuring electron-energy distribution, reducing measurement time from 1 hour to 5 minutes. Ion-energy distribution is drifting Maxwellian, and both ion peak energy and ion temperature are found to be higher for the smaller total flow-rate of germane diluted by hydrogen. Electron-energy distribution can be described by a two-temperature model and both temperatures are higher for the lower total flow-rate