Printable Thin-Film Sol-Gel Lead Zirconate Titanate (PZT) Deposition Using NanoJet and Inkjet Printing Methods

Lead zirconate titanate (PZT) sub-5µm thin-films deposited using NanoJet and inkjet printing techniques will be presented. PZT, a perovskite ferroelectric ceramic, possesses both electrical and mechanical properties making it well suited for sensor and actuator applications. Large-scale and additive manufacturing of PZT deposition is currently unobtainable. A novel PZT sol-gel, therefore, comprised of an alkoxide mixture, was adapted for printing. Polyethylene glycol (PEG, 200MW) was discovered to be a superior film forming aid to the PZT sol-gel composite. PEG was added to the PZT composite to prevent film cracking upon gelation and thermal sintering. A powder-based sample of the PZT sol-gel was characterized using Scanning Electron Microscopy-Energy Dispersive X-Ray Spectroscopy (SEM-EDS), and Raman Spectroscopy. The Raman spectra displayed wavelength peaks around 200cm-1, 400cm-1, and 800cm-1 which indicated the desired 52/48 PZT molar ratio composite. The PZT sol-gel was printed into a thin-film using NanoJet and inkjet printing onto a cleaned stainless-steel substrate. The thin-film was thermally sintered at 700oC, and quenched in liquid nitrogen, to produce a defect-free thick film. The sub-five micron thick PZT films exhibited ferroelectric properties. This work begins to show a forward pathway for the larger scale manufacturing of device applications, such as concussion sensors, pressure sensors, and aerospace products