Design of an asymmetric waveform spectrometer

Paper presented at the 2004 Annual Conference, TMS (The Minerals, Metals & Materials Society) A design for a handheld MEMS chemical detector is proposed. The detector will be used to detect trace amounts of chemicals in air. It can detect drugs, toxic chemicals and/or explosives. The proposed detector will use ion mobility spectrometry (IMS), a technique that is well known for accuracy and has been used in the past in suitcase sized chemical detectors. The separation and detection of the chemicals occurs in the drift channel and the process was modeled using the finite element method and CoventorWare modeling software. A manufacturing process sequence for the drift channel is proposed and was demonstrated