I-Line Resist Process Monitor

In order to confidently reproduce results obtained from experimentation or standard processing, the stability of the involved equipment’s performance must be understood. Therefore, it is important to monitor, on a regular basis, the outputs of an equipment set which are delivering a desired process. In this paper, a qualification test or qual” will be defined for RIT’s 150mm i-line photolithography process which utilizes a Canon FPA 2000-i1 exposure tool